Research on Common Optical Path Interferometry System Based on Fiber Array for Complex Surface Element Measurement
Citation
Keywords
- 复杂面形元件 / Complex Surface Element
- 共光路 / Common Optical Path
- 干涉测量 / Interferometry
- 光纤阵列 / Fiber Array
- 非零位干涉检测 / Non-null Interferometric Testing
- 光学设计 / Optical Design
- 装校 / Alignment/Assembly
- 检测精度 / Detection Accuracy
- 倾斜波面法 / Tilt Wave Surface Method
Brief
This Master's thesis presents the design and research of a common optical path interferometry system based on a fiber array for measuring complex surface elements, which aims to improve detection versatility, accuracy, and efficiency by using a freely generated point source array and reducing system errors.
Summary
This Master's thesis by 王劲松 (Wang Jinsong) proposes a novel common optical path interferometry system for measuring complex surface elements that utilizes a fiber array as a dynamically configurable point source generator. This design aims to overcome the limitations of traditional methods like CGH and dual-arm tilt wave interferometers by offering improved detection versatility through the flexible fiber array, higher detection accuracy due to the common optical path reducing system errors, and enhanced detection efficiency by avoiding complex error calibration. The effectiveness of the system was validated through experiments on spherical, paraboloid, and cylinder surfaces, with results showing high accuracy compared to a Zygo interferometer.
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