How much does EUV equipment cost?

Cost of EUV Equipment

Extreme Ultraviolet Lithography (EUV) equipment is crucial for the modern semiconductor manufacturing process, enabling the production of smaller, more efficient, and powerful microchips. The cost of these machines is significant, reflecting the advanced technology and precision engineering required.

The price for a single EUV lithography machine from ASML, the only company that manufactures these advanced systems, can exceed $120 million each. This figure can vary based on configuration, additional features, and after-sales service agreements.

In 2023, Intel's acquisition of ASML's entire stock of high-NA EUV machines highlighted the scarcity and high demand for this cutting-edge technology. These high-NA machines represent an advancement in EUV technology, offering better resolution and efficiency for chip manufacturing. Although the exact price for these high-NA systems was not disclosed, it is widely acknowledged that they are significantly more expensive than the standard EUV systems, suggesting prices well above the $120 million mark.

The immense cost of EUV equipment is a testament to its pivotal role in the semiconductor industry, pushing the boundaries of what's possible in chip miniaturization and performance enhancement.