What is the EUV wavelength?

Extreme Ultraviolet (EUV) Wavelength

Extreme Ultraviolet (EUV) lithography utilizes a very short wavelength of light to create micro- and nano-scale features on chips. The EUV wavelength is typically defined to be in the range of 10 to 13.5 nanometers (nm), significantly shorter than the wavelengths used in traditional photolithography methods, which are typically in the deep ultraviolet range of 193 nm.

EUV lithography represents a significant technological advancement in the field of semiconductor manufacturing, enabling the production of components with features sizes well below the wavelength of the light used for their creation. This technology is critical for continuing the trend of increasing microchip performance and density as described by Moore's Law.

Advantages of EUV Wavelength

• Allows for significantly smaller feature sizes and denser chip layouts.
• Improves the efficiency and speed of chips by reducing component size.
• Facilitates the continuation of Moore's Law by enabling further miniaturization of chip components.

Technical Challenges

The implementation of EUV lithography has faced several technical challenges, including:

• Developing reliable sources of EUV radiation.
• Creating masks and resist materials that are sensitive to EUV wavelengths.
• Overcoming issues with lens material and optics that can work effectively at these extreme wavelengths.

Despite these challenges, EUV lithography is becoming increasingly prevalent in semiconductor manufacturing, driven by its potential to significantly enhance chip performance and capacity.