What is the wavelength of a DUV laser?

Wavelength of a Deep Ultraviolet (DUV) Laser

Deep Ultraviolet (DUV) lasers emit light at the ultraviolet (UV) end of the light spectrum. The wavelength range of DUV lasers typically falls between 100 to 280 nanometers (nm). These lasers operate in a wavelength region that is shorter than that of visible light and near the boundary of X-rays in the electromagnetic spectrum.

Applications of DUV Lasers

DUV lasers are crucial in various applications due to their unique properties. They are widely used in:

  • Semiconductor lithography - for creating micro and nano-scale patterns on semiconductor wafers.
  • Spectroscopy - for identifying and quantifying materials through their spectral signatures.
  • Micromachining - for precision cutting, drilling, and shaping of materials at the micro-scale.
  • Biomedical applications - such as disinfection and DNA sequencing.

Key Features of DUV Lasers

DUV lasers are distinguished by their:

  • High photon energy - allowing them to break molecular bonds, making them effective for etching and material processing.
  • Short wavelength - enables high-resolution imaging and patter So how does this relate to optical engineering? In optical engineering, the selection of materials for the lenses, mirrors, and protective coatings that can withstand DUV radiation is critical. DUV lasers also pose unique challenges in terms of beam delivery and safety precautions due to their potential to cause photochemical damage to living tissues and degradation of traditional optical materials." } ```
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